JPH038895U - - Google Patents
Info
- Publication number
- JPH038895U JPH038895U JP5452889U JP5452889U JPH038895U JP H038895 U JPH038895 U JP H038895U JP 5452889 U JP5452889 U JP 5452889U JP 5452889 U JP5452889 U JP 5452889U JP H038895 U JPH038895 U JP H038895U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- coil
- quartz
- quartz tube
- bobbin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5452889U JPH038895U (en]) | 1988-08-02 | 1989-05-15 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10208588 | 1988-08-02 | ||
| JP5452889U JPH038895U (en]) | 1988-08-02 | 1989-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH038895U true JPH038895U (en]) | 1991-01-28 |
Family
ID=31718123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5452889U Pending JPH038895U (en]) | 1988-08-02 | 1989-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038895U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012146851A (ja) * | 2011-01-13 | 2012-08-02 | Tokyo Electron Ltd | 電極製造装置、電極製造方法、プログラム及びコンピュータ記憶媒体 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS3622266Y1 (en]) * | 1959-03-14 | 1961-08-26 | ||
| JPS5027017U (en]) * | 1973-07-05 | 1975-03-28 |
-
1989
- 1989-05-15 JP JP5452889U patent/JPH038895U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS3622266Y1 (en]) * | 1959-03-14 | 1961-08-26 | ||
| JPS5027017U (en]) * | 1973-07-05 | 1975-03-28 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012146851A (ja) * | 2011-01-13 | 2012-08-02 | Tokyo Electron Ltd | 電極製造装置、電極製造方法、プログラム及びコンピュータ記憶媒体 |